Аннотация
Hybrid micromachining and microfabrication techniques utilize concurrent deed of two or more micromachining procedures with assistance of some vitality in removal of material to augment the advantages and diminish the prospective difficulties observed in specific material ejection methods. There are different instances, like compound processes, energy aided micromachining methods, thermally aided micromachining, pulse-aided micromachining, and combined hybrid micromachining processes. This study introduces a unique categorization and analyses of the previous and current exploration and functions of the hybrid micromachining and microfabrication procedures and emphasizing its influences on performance characteristics. Even though it is an enthusiastic research field in unconventional and significant micromachining and microfabrication methods subsequently, inadequate acquaintance about proficiencies in shape, sizes, and controlling mechanisms is still the most important restraint in the progress of these procedures. In the adjacent future, there is plenty of opportunity for hybrid micromachining and microfabrication processes in studying of material removal at microlevel, consequence of residue strains, and working environment.