Аннотация
This chapter is devoted to experimental research on the investigated of the structural-phase, morphology, elemental composition, physical-mechanical, and tribological properties (friction, wear, and adhesion) of hard and superhard micro- and nanostructured coatings of systems based on (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N, and (Zr-Ti-Cr-Nb-Si)N were fabricated by vacuum-arc deposition in the nitrogen atmosphere. The authors in the work used advanced proven experimental research methods (SEM-EDX, TEM-EDS, XRD, SIMS, GDMS, PIXE, XPS, AFM, hardness measurements, and adhesion testing), as well as theoretical methods for analysing the results. Based on the results obtained, according to the experimental data, an optimal mode was selected that provides an increase in mechanical and tribological characteristics, and a method for vacuum-arc surface hardening was also developed. Such coatings seem to have prospects as protective ones for couples of friction and cutting tools.