Аннотация
In this work porous silicon samples obtained by electrochemical etching were investigated. Using scanning probe microscope the morphology of porous silicon samples was studied. To determine the thickness of the porous layer and the pore diameter, micrographs were obtained using a scanning electron microscope. The dimensions of the nanocrystallites were determined from the Raman spectra. For the detection of vapors of organic compounds, planar structures were used. The results of the study confirmed the possibility of using nanoporous silicon as a sensitive material for the determination of acetonitrile and chloroform vapors. It is shown that the adsorption phenomena in porous silicon depend on its structure and morphology. It is established that the humidity of the air when detecting the vapors of organic compounds under investigation has a significant effect on the sensitivity. It is also shown that such structures can be used as instruments for measuring air humidity.