Аннотация
We consider the possibilities of synthesis of multielement nanoscale coatings by structural engeneering. Obtained nitride coating (TiAlSiY)N was compared to four-component alloy TiAlSiY to estimate the influence of the reaction gas on the structural-phase composition and mechanical parameters. Investigation of deposited coatings were performed within X-ray diffraction (XRD), scanning electron microscopy (SEM), and hardness measurement techniques. Three-dimensional numerical model of the TiN phase was created for visualization of the atomic structure of the obtained coating (TiAlSiY)N. Size of the crystallites was calculated within the Debye-Scherrer method.