Аннотация
We report the development and characterization of a methane gas sensor made from copper oxide/porous silicon (CuO/PS) heterostructure.The sensor integrates the CuO layer on the PS surface, obtained by the DC magnetron sputtering technology, which increases the sensor's surface area and facilitates gas molecule interaction.We present an analysis of the sensor's morphological and structural characteristics, including detailed scanning electron microscopy (SEM) and X-ray diffraction (XRD) studies, and revealed the effective formation and interface of the heterostructure.The sensor demonstrates performance with good sensitivity to methane, characterized by a dynamic response.Sensitivity tests show a significant enhancement in signal response, and dynamic response evaluations indicate the repeatability of the sensor.The results suggest that the CuO/PS sensor offers a promising solution for methane detection, with potential applications in environmental monitoring, industrial safety, and process control.