Аннотация
In the paper electrophysical properties of ZnO nanorod arrays are investigated and features of the mechanism of gas sensitivity of the sensors to carbon monoxide (II) and humidity are examined. The ZnO nanorod arrays were grown on p-type silicon substrates. Metal contacts formed over the array of nanorods. Sensory structures were heated to a temperature of 100-200 ° C and subjected to carbon monoxide (II) at a concentration of 100-1000 ppm in nitrogen atmosphere and humidity at 50-75% in air. The results of the research showed that the properties of sensor structures based on ZnO nanorod arrays grown on silicon p-type substrates with respect to carbon monoxide (II) and humidity differ from the properties of chemoresistive sensors based on zinc oxide films.