Аннотация
The paper deals with the creation of technologies, methods and devices of the functional diagnostics and control of the sensitive elements (SE) and the measurement modules (MM) of microelectronic pressure sensors (MEPS). Methods used for diagnostic and control are non-destructive and are used at all stages of the process of sensor manufacturing. The classification of diagnostic and control methods is given, the basic methods that are technologically and energetically compatible with SE and MM of MEPS are defined. For MEPS, single and integrated validity criteria given to the multiplicative or additive forms are offered. It is noted that the hidden defects are difficult to detect in the operational control of the electrical characteristics of SE and MM. This is due to the fact that their identification requires a fairly long period of time and high levels of diagnostic loads, which may adversely affect the quality of SE and MM. It is shown that the optical scanning of crystal topology in photoexcitation mode is quite informative diagnostic method for SE and MM. A device for MEPS crystals testing has been designed. It simulates SE loading by discharge feed, heating and cooling.