Аннотация
This paper presents the results of optimizing the operating modes for the formation of low-energy Kr, Xe, and He ion beams at the DC-60 accelerator complex intended for simulation of radiation damage in materials. The electron cyclotron resonance (ECR) source of highly charged ions was upgraded by replacing the DECRIS-3 source with the modernized DECRIS-3M. In addition, the operating parameters of the ECR ion source, beam injection, transport, and scanning systems were optimized. The charge-state distributions and beam intensities were investigated; optimal beam formation conditions were determined, and a uniform beam current density distribution over the target surface was achieved. The average beam current on the target increased from 45 to 77 μA for He2+ ions, from 13 to 26 μA for Kr15+ ions, and from 6 to 14 μA for Xe23+ ions, corresponding to increases by factors of 1.7, 2.0, and 2.3, respectively. The obtained results reduce the time required to achieve the desired ion fluence and improve the efficiency of radiation damage simulation experiments in materials.