Аннотация
The article deals with the effect of irradiation with Si+ ions on phase transformations in the Ti–Al system during thermal annealing. An aluminum film with a thickness of 500 nm was deposited on VT1-00 titanium samples by magnetron sputtering, followed by ion implantation. Samples before and after irradiation with Si ions were annealed in a vacuum of 10−4 Pa in the temperature range 600–1000 °C. It was established that ion implantation reduces the dissolution of Al in α-Ti with the formation of titanium silicides (TiSi2, Ti5Si3) and stabilizes aluminide phases Ti3Al rich in aluminum. As a result, a composite structure based on titanium silicide/aluminide was obtained on the surface of the sample synthesized by complex treatment: deposition, irradiation with Si+, and thermal annealing at the near-surface layers. The formation of the phase-structural state of the implanted layers is associated with the displacement of atoms of the crystal lattice, a result that is reflected in an increase in the size of the crystal lattice and a decrease in microdistortion of the lattice. The opposite effect is observed with increasing temperature. This fact is explained by the relaxation of unstable large grains with an excess of internal energies. At the annealing temperature of 900–1000 °C, a significant increase in microhardness was observed due to silicide phases.