Аннотация
Thermal stability, tribological and electrochemical properties of TiSiCN coatings obtained by reactive plasma sputtering of mechanically activated powder mixtures of TiCN-SiC-Si system are investigated. The effect of arc current strength (400-600 A) on the test results and characteristics of the formed layer is shown. X-ray phase analysis and cross-section analysis by scanning electron microscopy confirm the formation of the coating of the Ti-Si-C-N system and make it possible to assess its thickness and microstructural features. Thermogravimetric analysis conducted in an N₂ atmosphere was used to compare the thermal stability of coatings when heated to 950 °C. According to the data of tribological tests, the dependence of the friction coefficient on the spraying mode was established and a tendency to its stabilization was noted at increased current values. Electrochemical studies in a 3.5% NaCl solution showed improved corrosion characteristics of the coatings compared to the substrate. The results obtained characterize TiSiCN coatings as promising protective layers for use in friction, heating and corrosive environments.