Аннотация
This study investigates titanium oxynitride (TiOxNy) coatings deposited by reactive magnetron sputtering on 316L stainless steel substrates in an Ar–N2–O2 gas mixture at a fixed N:O ratio of 1.6. The coatings were deposited under three reactive magnetron sputtering regimes with Ar flow rates of 33, 28, and 26 sccm and corresponding substrate biases of −50, −100, and −150 V, respectively, while the N2 and O2 flow rates were kept constant at 10 and 6 sccm. The coatings exhibited a dense microstructure, with thicknesses ranging from 2.13 to 5.51 μm. X-ray diffraction analysis revealed the formation of a multiphase structure comprising TiN, TiOxNy, and TiO. The deposition regime had a significant influence on the functional properties of the coatings. The lowest friction coefficients (µ ≈ 0.26–0.28) and stable tribological behavior were characteristic of the Ar26 sample. The highest corrosion resistance was observed for the Ar28 sample, with a corrosion current density of icorr = 2.82 × 10−7 A/cm2 and a corrosion rate of vcorr = 0.00573 mm/year. All coatings exhibited hydrophilic surface behavior, with contact angles of 50–57°, which may be relevant for further evaluation in biomedical surface applications. Thus, the structure and functional properties of TiOxNy coatings can be regulated by selecting an appropriate deposition regime, including the Ar flow rate, relative reactive gas fraction, and substrate bias. However, additional biological tests, including cytotoxicity, hemocompatibility, endothelialization, and platelet adhesion studies, are required before conclusions about vascular implant applicability can be made.