Аннотация
The article looks at how to make sensitive parts for gas analyzers that work at room temperature using thin films of tin oxide (SnO2) that are deposited on glass substrates. Three precursor systems were employed: a solution of SnCl4*5H2O in ethanol, a hydrosol of tin hydroxide, and a combination of them. The films were formed by spray pyrolysis at 400°C. X-ray structural analysis and scanning electron microscopy were performed; it was found that the crystallite sizes were 6–13 nm. We studied the sensitivity of the films to water vapor. The highest sensitivity (R0/Rvapor = 3.75) and response time (less than 1 second) were observed in films obtained from the sol. When adsorption on t-SnO2 (001) and c-SnO2 (111) surfaces were modeled, it was found that the c-SnO2 structure is better for detecting carbon monoxide because it stays stable in high humidity. The results obtained are of interest in the development of new gas sensors.