Аннотация
In this work, we report the synthesis, characterization, and properties of Ni- and Ag-based plasmonic nanoparticles (PNPs) incorporated into a porous silicon (por-Si) matrix fabricated by masking the wafer surface using optical lithography and subsequent pore formation with the deposition of plasmonic-active metal nanoparticles (Me-PNPs) by single-stage metal-assisted electrochemical etching (EMACE). Preliminary masking of the silicon wafer surface using optical lithography and subsequent pore etching by the EMACE method with a simultaneous deposition of Me-PNPs allows for the fabrication of a periodic plasmonic structure, which demonstrates an enhancement of Raman signal, photoluminescence, and an improvement in water evaporation processes. Nickel-doped plasmonic structures created using photolithography and Ni+-ion implantation have high chemical stability due to the formation of nickel silicides (NiSi) in the surface layer. Silver-doped plasmonic structures on porous silicon, Ag-PNPs/por-Si, demonstrate a substantial enhancement of the Raman scattering signal at frequencies corresponding to the nanocrystalline phase, nc-Si, and high visible photoluminescence. The luminosity of silver plasmonic structures is due to the radiative properties of the Ag-PNPs/por-Si plasmonic structure, consisting of silver nanoparticles (Ag-PNPs) and porous silicon nanocrystallites (NC/por-Si). The calorific value of plasmonic structures on porous silicon Me-PNPs/por-Si depends on the time of the metal-stimulated etching of pores and the deposition of plasmonic nanoparticles (PNPs). The calorific value of the silver plasmonic structure Ag-PNPs/por-Si is higher than that of Ni-PNPs/por-Si and Ni/Ag-PNPs/por-Si. It exceeds the efficiency of known solar thermal vapor generators and is equal to Ea = 7.58 kg·m–2·h–1. The obtained results have important applied values in the technology of micro- and nanoelectronics for the fabrication of radiating devices and appliances using chemical, electrochemical etching methods; highly efficient solar thermal generators.