Аннотация
The computer simulation of cascade-probabilistic functions (CPF) and the concentration of vacancy clusters depending on the depth h and the number of interactions n is carried out. By the example of titanium implantation in iron and aluminum in titanium, it is shown that the CPF as a function of both n and h are in a very narrow range of the domain of determination, while the concentration of clusters in a fairly wide range. There is an extensive maximum, and the concentration drops to zero at the end of the ion run.