Аңдатпа
Microstructure and oxygen stoichiometry of YBaCuO films manufactured by laser ablation are investigated. Dependence of the specific electrical resistivity and superconducting parameters of films on microstructure and oxygen stoichiometry is demonstrated. Conditions of deposition are determined, under which films with minimum microstructure defects and good conducting properties are formed. It was found that the concentration of oxygen atoms in the deposited film on the SrTiO 3 surface changes non-linear with the substrate temperature increasing. Also the stoichiometry of the films was calculated and their chemical composition was determined.