Аңдатпа
Titanium carbonitride (TiCN) is of high relevance in the field of creating wear-resistant protective coatings in order to ensure maximum wear resistance and service life of parts of friction units. Titanium carbonitride coatings were obtained by magnetron sputtering at various bias substrate in the range from 0 to -130 V with a step of 10 V. The effect of the bias substrate on the deposition rate, phase and elemental composition, and the friction coefficient of the obtained coatings was investigated. As a result of the obtained dependences, the most optimal mode of deposition by the method of reactive magnetron sputtering with a negative bias voltage on the substrate was determined.